Three-dimensional structures obtained by double diffusion and electrochemical etch stop
- 1 September 1993
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 3 (3), 141-142
- https://doi.org/10.1088/0960-1317/3/3/011
Abstract
The technological possibilities of electrochemical etch stop and phosphorus diffusion for the manufacture of three-dimensional structures are considered. Two distinct mechanical elements are considered : bridges are non-uniform diaphragms. Some practical problems of the technology are discussed.Keywords
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