Recoil implantation from a thick film source
- 1 January 1978
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 38 (1-2), 41-43
- https://doi.org/10.1080/00337577808233207
Abstract
A theoretical treatment is presented of recoil implantation for do pant film thicknesses of the order of the mean damage depth. An expression for the recoil implantation profile in the substrate is obtained and numerical calculations using this have been performed.Keywords
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