The anodic oxidation of GaAs in an oxygen plasma generated by a D.C. electrical discharge
- 1 January 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 56 (1-2), 39-49
- https://doi.org/10.1016/0040-6090(79)90050-6
Abstract
No abstract availableKeywords
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