Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition
- 1 February 2003
- journal article
- Published by Elsevier in Materials Chemistry and Physics
- Vol. 78 (3), 733-738
- https://doi.org/10.1016/s0254-0584(02)00375-9
Abstract
No abstract availableKeywords
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