Atom-probe study of the initial stage of silicide formation
- 2 March 1983
- journal article
- Published by Elsevier in Surface Science
- Vol. 126 (1-3), 529-533
- https://doi.org/10.1016/0039-6028(83)90753-7
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Performance of the new high mass resolution time of flight atom probeReview of Scientific Instruments, 1981
- Epitaxial growth of the nickel disilicide phaseThin Solid Films, 1980
- Review of binary alloy formation by thin film interactionsJournal of Vacuum Science and Technology, 1979
- Field ion microscope study on the interaction of gallium with metals. II. Alloy formation with molybdenum and anisotropic binding force in Mo3GaJournal of Applied Physics, 1973
- Formation of NiSi and current transport across the NiSi-Si interfaceSolid-State Electronics, 1971