Synthesis of Si-C-N coatings by thermal Plasmajet chemical vapour deposition applying liquid precursors
- 5 September 2001
- journal article
- research article
- Published by Wiley in Applied Organometallic Chemistry
- Vol. 15 (10), 841-857
- https://doi.org/10.1002/aoc.239
Abstract
No abstract availableKeywords
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