Conductivity and dielectric properties of silicon nitride thin films prepared by RF magnetron sputtering using nitrogen gas
- 15 January 2003
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 423 (2), 267-272
- https://doi.org/10.1016/s0040-6090(02)01049-0
Abstract
No abstract availableKeywords
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