Epitaxial NiSi layers on 〈111〉-oriented Si obtained by pulsed laser irradiation
- 15 July 1989
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 66 (2), 861-866
- https://doi.org/10.1063/1.343510
Abstract
Thermally grown NiSi layers on (111) Si substrates have been irradiated by 35‐ns Nd laser pulses in the energy density range of 0.3–2.0 J/cm2. The duration of the laser‐induced melt was monitored in situ by transient reflectivity measurements. Samples have been subsequently analyzed by Rutherford backscattering in combination with channeling and by transmission electron microscopy. It is shown that laser irradiation in a narrow energy density range results in the formation of a novel epitaxial NiSi phase on (111) Si. Electron microscopy studies show that this silicide phase could have a cubic symmetry with a lattice constant very similar to that of Si. This phase is, however, metastable and it transforms into the orthorhombic one upon thermal annealing at about 300 °C.Keywords
This publication has 11 references indexed in Scilit:
- Melting dynamics of/Si under pulsed laser irradiationPhysical Review B, 1987
- Solidification kinetics of pulsed laser melted silicon based on thermodynamic considerationsApplied Physics Letters, 1985
- Formation of thin films of NiSi: Metastable structure, diffusion mechanisms in intermetallic compoundsJournal of Applied Physics, 1984
- Liquid phase growth of epitaxial Ni and Co silicidesApplied Physics Letters, 1983
- Epitaxial NiSi2 formation by pulsed laser irradiation of thin Ni layers deposited on Si substratesApplied Physics Letters, 1983
- Growth of single crystal epitaxial silicides on silicon by the use of template layersApplied Physics Letters, 1983
- Epitaxial silicidesThin Solid Films, 1982
- Transmission electron microscopy of the formation of nickel silicidesPhilosophical Magazine A, 1982
- Kinetics of motion of crystal-melt interfacesAIP Conference Proceedings, 1979
- Dynamics of laser annealingAIP Conference Proceedings, 1979