Materials Analysis with High Energy Ion Beams Part III: Elastic Recoil Detection
- 1 September 1987
- journal article
- Published by Springer Nature in MRS Bulletin
- Vol. 12 (6), 35-39
- https://doi.org/10.1557/s0883769400067208
Abstract
The fundamentals of the high energy ion beam technique Elastic Recoil Detection are presented. The potential of this analysis technique for the depth-resolved determination of light elements in a heavy matrix is illustrated with examples from semiconductor technology.Keywords
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