Detection of Hydrogen on Solid Surfaces by Low-Energy Recoil Ion Spectroscopy
- 1 September 1984
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 23 (9A), L694-696
- https://doi.org/10.1143/jjap.23.l694
Abstract
Direct detection of hydrogen on the topmost surface of an hydrogenated amorphous silicon film has been made using a low-energy recoil ion spectroscopy method. Energies of positive and negative recoil ions (H+ and H-) produced by Ne+ ion bombardment (below 2 keV) have been measured by an electrostatic analyzer and they agree well with those predicted by elastic binary collision model between Ne and H.Keywords
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