Pulsed excimer laser deposition and characterization of ferroelectric Pb(Zr0.52Ti0.48)O3 thin films
- 1 September 1992
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 7 (9), 2521-2529
- https://doi.org/10.1557/jmr.1992.2521
Abstract
No abstract availableKeywords
This publication has 29 references indexed in Scilit:
- Multi-ion-beam reactive sputter deposition of ferroelectric Pb(Zr,Ti)O3 thin filmsJournal of Applied Physics, 1992
- Integrated sol-gel PZT thin-films on Pt, Si, and GaAs for non-volatile memory applicationsFerroelectrics, 1990
- Pulsed-laser evaporation technique for deposition of thin films: Physics and theoretical modelPhysical Review B, 1990
- Ferroelectric memoriesFerroelectrics, 1990
- Metallo-organic decomposition (MOD) processing of ferroelectric and electro-optic films: A reviewFerroelectrics, 1990
- Preparation of Pb(Zn0.52Ti0.48)O3 Films by Laser AblationJapanese Journal of Applied Physics, 1990
- Preparation of c-Axis-Oriented PbTiO3 Thin Films by MOCVD under Reduced PressureJapanese Journal of Applied Physics, 1989
- Characterization of Pb(Zr,Ti)O3 thin films deposited from multielement metal targetsJournal of Applied Physics, 1988
- Ferroelectric (Pb,La)(Zr,Ti)O3 epitaxial thin films on sapphire grown by rf-planar magnetron sputteringJournal of Applied Physics, 1986
- PLZT thin-film waveguidesApplied Optics, 1984