Realization of ultra dense arrays of vertical silicon nanowires with defect free surface and perfect anisotropy using a top-down approach
- 1 August 2011
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 88 (8), 2622-2624
- https://doi.org/10.1016/j.mee.2010.12.102
Abstract
No abstract availableKeywords
Funding Information
- The European Commission
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