Structure transitions in amorphous silicon under laser irradiation
- 1 January 1979
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 50 (1), 259-265
- https://doi.org/10.1063/1.325709
Abstract
An amorphous to a polycrystal or a single‐crystal transition by ruby‐laser irradiation of amorphous Si, obtained through ion implantation, is discussed. Both free‐generation and Q‐switched laser mode operation are used. Under a free‐generation operation only the amorphous to polycrystal transition is obtained, which is attributed to nonthermal effects. In the Q‐switched mode both transitions are obtained. The single‐crystal transition is interpreted as due mainly to the melting of the amorphous layer.Keywords
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