Comparative study of large grains and high-performance TFTs in low-temperature crystallized LPCVD and APCVD amorphous silicon films
- 1 January 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 237 (1-2), 255-267
- https://doi.org/10.1016/0040-6090(94)90270-4
Abstract
No abstract availableKeywords
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