Liquid phase epitaxial growth of large area Hg1−xCdxTe epitaxial layers

Abstract

The liquid phase epitaxial technique in a horizontal boat is used to grow large area epitaxial layers of Hg_1−xCd_xTe on CdTe substrates with x=1 to x=0.15. Areas as large as 25 cm² have been grown from Te‐rich melts that have excellent compositional uniformity (Δx=0.001–0.0028) and run‐to‐run reproducibility (Δx=0.003–0.004). Results are presented on surface morphology, compositional grading, and electrical properties. Histograms are presented showing run‐to‐run wavelength reproducibility and uniformity across the epilayers for both 10–15 and 20–25 cm² areas for selected wavelengths with x≂0.3. Data are presented showing run‐to‐run uniformity of carrier concentration (4.5±0.66×10¹⁶ cm⁻³) and hole mobility (272±15 cm²/Vs) at 77 K for x≂0.3, including their dependence on wavelength.