Compositional disordering and the formation of semi-insulating layers in AlAs-GaAs superlattices by MeV oxygen implantation
- 1 January 1989
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 18 (1), 39-44
- https://doi.org/10.1007/bf02655342
Abstract
No abstract availableKeywords
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