Laser patterning and critical current measurements of submicrometer lines of Y-Ba-Cu-O
- 4 September 1989
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 55 (10), 1044-1046
- https://doi.org/10.1063/1.101726
Abstract
Superconducting strips of 0.6 μm width were fabricated by direct laser writing on mirror‐like Y‐Ba‐Cu‐O thin films on various substrates. These films were grown by laser deposition without post‐annealing. Laser ablation etching had no effect on the Tc and Jc until the lines were Tc. The critical current densities for all patterned lines were measured to be ∼4×106 A/cm2 at 20 ° K.Keywords
This publication has 17 references indexed in Scilit:
- Superconducting Lines Fabricated from Epitaxial Y-Ba-Cu-O FilmsJapanese Journal of Applied Physics, 1988
- Use of electron beam lithography to selectively decompose metalorganics into patterned thin-film superconductorsApplied Physics Letters, 1988
- Deposition of superconducting Y-Ba-Cu-O films at 400 °C without post-annealingApplied Physics Letters, 1988
- Chemical etching of Y-Cu-Ba-O thin filmsApplied Physics Letters, 1988
- Direct laser writing of superconducting patterns of Y1Ba2Cu3O7−δApplied Physics Letters, 1988
- Reactive ion beam etching of Y-Ba-Cu-O superconductorsApplied Physics Letters, 1988
- Pulsed laser etching of high T c superconducting filmsApplied Physics Letters, 1987
- Epitaxial ordering of oxide superconductor thin films on (100) SrTiO3 prepared by pulsed laser evaporationApplied Physics Letters, 1987
- Superconducting Y-Ba-Cu-O oxide films by sputteringApplied Physics Letters, 1987
- Critical-current measurements in epitaxial films of compoundPhysical Review Letters, 1987