A capacitance-based method for experimental determination of metallurgical channel length of submicron LDD MOSFETs
- 1 March 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 41 (3), 403-412
- https://doi.org/10.1109/16.275227
Abstract
No abstract availableKeywords
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