Measurement of mechanical resonance and losses in nanometer scale silicon wires
- 16 August 1999
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 75 (7), 920-922
- https://doi.org/10.1063/1.124554
Abstract
We present data on nanofabricated suspended silicon wires driven at resonance. The wires are electrostatically driven and detected optically. We have observed wires with widths as small as 45 nm and resonant frequencies as high as 380 MHz. We see a strong dependence of the resonant quality factor on the surface to volume ratio.Keywords
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