Harmonic analysis of discharge voltages as a tool to control the RF sputtering deposition process
- 1 January 2009
- journal article
- Published by IOP Publishing in Europhysics Letters
- Vol. 85 (1)
- https://doi.org/10.1209/0295-5075/85/15002
Abstract
No abstract availableThis publication has 23 references indexed in Scilit:
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